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Guardian , The New Standard in Semiconductor Industry Safety

Categories > Guardian > The New Standard in Semiconductor Industry Safety

Product Name:

The New Standard in Semiconductor Industry Safety

Features:

Specification:

Guardian is combustion type exhaust gas processing unit intended for processing flammable and toxic gases used in the manufacture of semiconductors.

FEATURES

GUARDIAN employs a unique combustion method to process safely and reliably various gases used in the manufacture of semiconductors. GUARDIAN has following features.

1. This unit can completely process to a safe level any exhaust gases including those from very low to high concentrations.

2. This unit boasts a high reliability factors and is easy to maintain as a result of the simple configuration of its combustion chamber.

3. The exhaust gas inlet port is large, thus preventing any choking from happening.

4. The unit can combust flammable gases like SiH4 and oxidized gases like NF3 simultaneously.

5. This unit completely provides fail-safe operations.

6. The system is simple, easy to operate and foolproof.

7. H2, CH4, and C3H8 can be used for fuel gas.

Safety Approval:

PROCESSING PRINCIPLE

The air drawn into the unit by means of the scrubber fan creates a vortex inside the combustion chamber. At the same time, hydrogen and compressed air are supplied continuously to he ignition plug, creating he wall of the flame. The exhaust gas to be processed is fed to this flame, and then burned reliably in the patented combustion chamber.

The ignited exhaust gas is mixed with the oxygen in the vortex, and also the dwell time is long, hence complete combustion takes place.

With conventional combustion processing units, there was a possibility of re-combustion because of in complete combustion and the occurrence of bubbles of silane whose surface is covered with silicon dioxide. Guardian, on the other hand, shears off the bubbles in the vortex, thus ensuring complete combustion and safe processing.

The air drawn into the combustion chamber realizes complete combustion and also cools the combustion chamber. In addition, it conveys the oxide powder to the scrubber without allowing it to adhere to the duct. The dust generated reaches the scrubber, so use the scrubber as a dust collector.

Thermocouples for monitoring the temperature of the combustion chamber and the exhaust gas temperature are installed as safety devices. In addition, photo sensor monitors the combustion condition, enabling you to take prompt action in the event of an abnormality.

Other Description:

STANDARD FLOW

This is the detailed information for The New Standard in Semiconductor Industry Safety, Guardian. The information includes model, name, description and specification for The New Standard in Semiconductor Industry Safety, Guardian. Related Keywords : Guardian, Exhaust Gas Unit, Exhaust Gas Processing Unit, Exhaust Gas Treatment Unit, Gas Treatment, Gas Treatment Unit

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FEATURES
GUARDIAN employs a unique combustion method to process safely and reliably various gases used in the manufacture of semiconductors. GUARDIAN has following features.
1.	This unit can completely process to a safe level any exhaust gases including those from very low to high concentrations.
2.	This unit boasts a high reliability factors and is easy to maintain as a result of the simple configuration of its combustion chamber.
3.	The exhaust gas inlet port is large, thus preventing any choking from happening.
4.	The unit can combust flammable gases like SiH4 and oxidized gases like NF3 simultaneously.
5.	This unit completely provides fail-safe operations.
6.	The system is simple, easy to operate and foolproof.
7.	H2, CH4, and C3H8 can be used for fuel gas.

PROCESSING PRINCIPLE
	The air drawn into the unit by means of the scrubber fan creates a vortex inside the combustion chamber. At the same time, hydrogen and compressed air are supplied continuously to he ignition plug, creating he wall of the flame. The exhaust gas to be processed is fed to this flame, and then burned reliably in the patented combustion chamber.
	The ignited exhaust gas is mixed with the oxygen in the vortex, and also the dwell time is long, hence complete combustion takes place.
	With conventional combustion processing units, there was a possibility of re-combustion because of in complete combustion and the occurrence of bubbles of silane whose surface is covered with silicon dioxide. Guardian, on the other hand, shears off the bubbles in the vortex, thus ensuring complete combustion and safe processing.
	The air drawn into the combustion chamber realizes complete combustion and also cools the combustion chamber. In addition, it conveys the oxide powder to the scrubber without allowing it to adhere to the duct. The dust generated reaches the scrubber, so use the scrubber as a dust collector.
	Thermocouples for monitoring the temperature of the combustion chamber and the exhaust gas temperature are installed as safety devices. In addition, photo sensor monitors the combustion condition, enabling you to take prompt action in the event of an abnormality.