particle collector 2018-03-26T18:02:45+00:00

GAS Exhausting System

particle collector

Particle Collector

BACK GAS Exhausting System

Particle Collector

Proposal on System Construction for CVD-C #5, #6, #7, #8

*CVD-C has 1-Ch and 1-LL and 1-UL. *G8 has 6-inlet port.

Outline on Proposal

Reaction on combustion abatement :
SiH4:SiH4+2O2→SiO2+2H2O
PH3:2PH3+4O2→P2O5+3H2O
H2:2H2+O2→2H2O
NF3:4NF3+3CH4+3O2→2N2+3CO2+12HF
TMB, B2H6:2B+1/2 5O2 →B2O5, 2B+1/2 3O2→B2O3
DEZ:Zn+O2 →ZnO2

Combustion Abatement Device-FEATURES(5)-

Security Feature on Hydrogen Application → Patented Original Technology